OBJECT = COLUMN NAME ="ROTATION OFFSET" COLUMN_NUMBER = 1 DATA_TYPE = MSB_UNSIGNED_INTEGER START_BYTE = 1 BYTES = 2 DESCRIPTION = "Rotation offset for substrate." END_OBJECT = COLUMN OBJECT = COLUMN NAME ="HEIGHT" COLUMN_NUMBER = 2 DATA_TYPE = MSB_UNSIGNED_INTEGER START_BYTE = 3 BYTES = 2 DESCRIPTION = "Height of substrate." END_OBJECT = COLUMN