August 17, 2008 TEGA_UHF_Char_v2_r1
TEGA UHF Characterization
Reconciled with block: tega_uhf_char_r4
Objectives:
Power on and perform a ramp during a UHF pass.
Configuration:
Inputs:
Filament = 1
Multiplier Voltage: = 3300
Pre-heat duration: minimum 30 seconds
Select TA #: oven_ID = ____
Ramp_time = 3003
Pass_duration = 900
Constraints: Start 15 minutes before the start of the pass
Gases Used: None
Filaments Used: 1
LOW Emission
SW Version (386) V513 SW Version (EGA): V321
Sweep and hop mode version(s): MODE TABLE V123
Super modes and Sweep modes used: Supermodes 1, 14
Supermodes running in ramp: 14
Note: TEGA is checked to see if TEGA is safed. If so, abort self to end activity
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1. Turn ON TEGA – Call TEGA_power_on
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1.1.1. TEGA_MAIN1_PWR "ON"
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1.1.2. TEGA_MAIN2_PWR "ON"
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1.1.3. TEGA_MAIN3_PWR "ON"
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1.1.4. Start the TEGA 386 FSW
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2. Pause 3 Minutes (collect engineering data at a high rate before turning down)
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3. Call Sequence 30A
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4. Pause 30 seconds (set by minimum preheat duration of 30 seconds)
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5. Turn on EGA
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5.1.1. TEGA/FSW:EGA:Change EGA State
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5.1.2. Restore the modes from EEPROM 0
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5.1.3. EGA Commands:Restore Mode
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5.1.4. Run mode 37
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6. Call tega_ega_prep filament 1, mult volt
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6.1.1.1. Sets JPlate 0 to -107V
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6.1.1.2.Sets Jplate 1 to -92V
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6.1.1.3.Start SM 1 pause 1 sec
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6.1.1.4.Set MV 3300V Pause 1 sec
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6.1.1.5.Ion Pump ON
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6.1.1.6.Pause 1 second
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6.1.1.7.Emission ON
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6.1.1.8.Pause 2 Minutes
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6.1.1.9.Stop SM 1
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7. Execute 32A (sets timers)
8. Call tega_select_oven oven_id = _______
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8. Turn up readings on selected item (collect on timer 1)
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8.1 mem_shld_err
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8.2 mem_oven_err
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8.3 mem_shld_int_hi
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8.4 mem_shld_int_lo
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8.5 mem_oven_int_hi
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8.6 mem_oven_int_lo
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8.7 ta_shld_temp
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8.8 ta_oven_temp
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9. Set timer 2 to 1 second
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10. Execute 20A (sets timers)
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11. Set GV model power for ramp
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12. Set OV_START_Val = ______
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13. Set SH_START_Val = ______
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14. Set T_START_Val = ______
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15. Start Ramp - Side A Start Segment 101, number of segments 2
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16. Pause 5 minutes, then delay by pass_duration
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17. Pause 3 minutes, then abort ramp
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18. Turn off EGA: CALL tega_ega_off
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18.1.1. EGA Shutdown:
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18.1.2. Multiplier Voltage OFF
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18.1.3. Wait 5 secs
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18.1.4. Emission Off
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18.1.5. Wait 5 secs
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18.1.6. Ion Pump Control OFF
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18.1.7. Activate Sequence 7A to turn the EGA OFF
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19. Turn off TEGA: CALL tega_power_off
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19.1.1. Turn off the third TEGA switch
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19.1.2. Turn off the second TEGA switch
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19.1.3. Turn off the first TEGA switch
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19.1.4. FPGA Dump – Aker Valve state